Electrical fuse device

ABSTRACT

The invention relates generally to a fuse device of a semiconductor device, and more particularly, to an electrical fuse device of a semiconductor device. Embodiments of the invention provide a fuse device that is capable of reducing programming error caused by non-uniform current densities in a fuse link. In one respect, there is provided an electrical fuse device that includes: an anode; a fuse link coupled to the anode on a first side of the fuse link; a cathode coupled to the fuse link on a second side of the fuse link; a first cathode contact coupled to the cathode; and a first anode contact coupled to the anode, at least one of the first cathode contact and the first anode contact being disposed across a virtual extending surface of the fuse link.

CROSS-REFERENCE TO RELATED PATENT APPLICATION

This application is a Continuation of application Ser. No. 12/203,256,filed Sep. 3, 2008, which claims the benefit of Korean PatentApplication No. 10-2007-0089078, filed on Sep. 3, 2007, in the KoreanIntellectual Property Office, the disclosure of which is incorporatedherein in its entirety by reference.

SUMMARY OF THE INVENTION

The invention relates generally to a fuse device of a semiconductordevice, and more particularly, to an electrical fuse device of asemiconductor device.

In an electrical fuse, a programming current flows through a fuse link,causing the link to heat and open. This programming process may also bereferred to as blowing the fuse. When a program current density is notsufficiently uniform during the blowing process, the fuse link may beonly partially separated. Embodiments of the invention provide a fusedevice that is capable of reducing such a programming error.

According to an aspect of the present invention, there is provided anelectrical fuse device including: an anode; a fuse link coupled to theanode on a first side of the fuse link; a cathode coupled to the fuselink on a second side of the fuse link; a first cathode contact coupledto the cathode; and a first anode contact coupled to the anode, at leastone of the first cathode contact and the first anode contact beingdisposed across a virtual extending surface of the fuse link.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages of the present inventionwill become more apparent by describing in detail exemplary embodimentsthereof with reference to the attached drawings in which:

FIG. 1 is an equivalent circuit diagram of an electrical fuse deviceaccording to an embodiment of the invention;

FIG. 2 is a plan view of an electrical fuse device according to anembodiment of the invention;

FIGS. 3A and 3B are diagrams respectively illustrating the electricalfuse device of FIG. 2 taken along lines IIIa-IIIa′ and IIIb-IIIb′ ofFIG. 2;

FIG. 4 is a diagram illustrating the electrical fuse device of FIG. 2taken along line IIIb-IIIb′ in a programming mode according to anembodiment of the invention;

FIG. 5 is a plan view of an electrical fuse device according to anotherembodiment of the invention;

FIG. 6 is a sectional diagram of the electrical fuse device of FIG. 5taken along the line VI-VI′ of FIG. 5; and

FIG. 7 is a plan view of an electrical fuse device according to yetanother embodiment of the invention.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, the invention will be described more fully with referenceto the accompanying drawings, in which exemplary embodiments of theinvention are shown. The invention may, however, be embodied in manydifferent forms and should not be construed as being limited to theembodiments set forth herein; rather, these embodiments are provided sothat this disclosure will be thorough and complete, and will fullyconvey the concept of the invention to those skilled in the art. In thedrawings, it will be understood that when a layer is referred to asbeing “on” another layer or a substrate, it can be directly on the otherlayer or the substrate, or intervening layers may also be present.

FIG. 1 is an equivalent circuit diagram of an electrical fuse deviceaccording to an embodiment of the invention.

Referring to FIG. 1, an anode A of an electrical fuse device F isconnected to a voltage applying circuit 10. A cathode C of theelectrical fuse device F is connected to a drain of a selectiontransistor Ts and a fuse state sensing circuit 20. A source of theselection transistor Ts may be connected to a reference voltage S₁, anda gate of the selection transistor Ts may be connected to ground. Thevoltage applying circuit 10 applies a programming voltage or a sensingvoltage to the anode A. The fuse state sensing circuit 20 senses acurrent flowing through the fuse device F and senses a programming stateof the electrical fuse device F.

FIG. 2 is a plan (or layout) view of an electrical fuse device accordingto an embodiment of the invention.

Referring to FIG. 2, the electrical fuse device F includes the anode Aand the cathode C separated from each other on a substrate. In oneembodiment of the invention, the anode A and the cathode C may be spacedapart from each other in an X direction. A fuse link FL connected to theanode A and the cathode C is interposed between the anode A and thecathode C. In one embodiment of the invention, the fuse link FL may beextended in an X direction. The fuse link FL may be connected to acenter portion of the anode A and a center portion of the cathode C. Thewidth W_FL of the fuse link FL in a Y direction may be less than thewidth W_C of the cathode C in a Y direction. The width W_FL of the fuselink FL in a Y direction may also be less than the width W_A of theanode A in a Y direction. Here, X and Y directions may be reversed andthe directions of elements are not limited thereto.

The width W_FL of the fuse link FL in a Y direction may be the minimumwidth of a circuit according to a design rule. The anode A, the cathodeC, and the fuse link FL may be disposed on the same plane.

The area of the cathode C may be greater than that of the anode A.Accordingly, a metal migration occurring in a direction from the cathodeC to the anode A may be smoothly accomplished while programming the fusedevice F.

A first cathode contact 135C₁ is connected to the cathode C. A cathodewiring (e.g., a circuit trace, not shown) may be connected to the uppersurface of the first cathode contact 135C₁. The cathode wiring may alsobe connected to the drain of the selection transistor Ts of FIG. 1 andthe fuse state sensing circuit 20 of FIG. 1. The first cathode contact135C₁ may be disposed relatively near the fuse link FL and may bedisposed perpendicularly to an extending direction (i.e., the long axis)of the fuse link FL.

A first anode contact 135A₁ is connected to the anode A. An anode wiring(e.g., a circuit trace, not shown) may be connected to the upper surfaceof the first anode contact 135A₁. The anode wiring may also be connectedto the voltage applying circuit 10 of FIG. 1. The first anode contact135A₁ may be disposed relatively near the fuse link FL and may bedisposed perpendicularly to an extending direction (i.e., the long axis)of the fuse link FL.

At least one of the first cathode contact 135C₁ and the first anodecontact 135A₁ may be disposed to cross a virtual extending surface FL_Cand FL_A, respectively, of the fuse link FL. Accordingly, a currentdensity in the fuse link FL according to a potential difference betweenthe first cathode contact 135C₁ and the first anode contact 135A₁ may beuniform while programming the fuse device F. As a result, a metalmigration uniformly occurs in the fuse link FL so that a fuseprogramming error can be reduced.

The first cathode contact 135C₁ may have the width W_135C₁ in a Ydirection that is greater than the width W_FL of the fuse link FL in a Ydirection. Thus, even if the first cathode contact 135C₁ is misalignedin a Y direction, the first cathode contact 135C₁ may cross the virtualextending surface FL_C of the fuse link FL. A current density in thefuse link FL may therefore be more uniform while programming theelectrical fuse device F. Likewise, the first anode contact 135A₁ mayhave the width W_135A₁ in a Y direction that is greater than the widthW_FL of the fuse link FL in a Y direction. So even if the first anodecontact 135A₁ is misaligned in a Y direction, the first anode contact135A₁ may cross the virtual extending surface FL_A of the fuse link FL.Thus a current density in the fuse link FL may be more uniform whileprogramming the electrical fuse device F.

Preferably, the width of the first cathode contact W_135C₁ may be 1.5times the width W_FL of the fuse link FL. Similarly, the width of thefirst anode contact W_135A₁ may also be 1.5 times greater than the widthW_FL.

In an alternative embodiment, the width of the first cathode contactW_135C₁ may extend the full width W_C of the cathode C. In the same ordifferent embodiment, the width of the first anode contact W_135A₁ mayextend the full width W_A of the anode A.

A second cathode contact 135C₂ may contact the cathode C relatively nearthe first cathode contact 135C₁. The cathode wiring (not shown) may alsobe connected to the second cathode contact 135C₂. Separately or incombination, a second anode contact 135A₂ may contact the anode Arelatively near the first anode contact 135A₁. The anode wiring (notshown) may also be connected to the second anode contact 135A₂. Thesecond cathode contact 135C₂ and the second anode contact 135A₂ preventa current from being centralized in the first cathode contact 135C₁ andthe first anode contact 135A₁, respectively. Such redundant connectionsduring programming may prevent overheating of the first cathode contact135C₁ and the first anode contact 135A₁.

FIGS. 3A and 3B are diagrams respectively illustrating the electricalfuse device of FIG. 2 taken along lines IIIa-IIIa′ and IIIb-IIIb′ ofFIG. 2.

Referring to FIGS. 2, 3A, and 3B, the anode A, the cathode C, and thefuse link FL are disposed on a substrate 100. The anode A, the cathodeC, and the fuse link FL may each include a high resistance conductivelayer 110 and a low resistance conductive layer 115 that aresequentially stacked. The high resistance conductive layer 110 hasrelatively large resistance and may be a semiconductor layer, forexample, a polysilicon layer or an amorphous silicon layer. The lowresistance conductive layer 115 has a resistance lower than that of thehigh resistance conductive layer 110 and may be, for instance, a metallayer or a metal silicide layer. The metal layer may be or include, forexample, tungsten (W), molybdenum (Mo), tantalum (Ta), cobalt (Co),titanium (Ti), aluminum (Al), copper (Cu), platinum (Pt), or an alloythereof. The metal silicide layer may be or include, for instance,tungsten silicide, molybdenum silicide, titanium silicide, tantalumsilicide, hafnium silicide, cobalt silicide, or platinum silicide.

When the high resistance conductive layer 110 is a semiconductor layerand the low resistance conductive layer 115 is a metal layer, aninterface control layer (not shown) may be interposed between the highresistance conductive layer 110 and the low resistance conductive layer115. The interface control layer may include an ohmic contact layer anda barrier layer, wherein the ohmic contact layer reduces a Schottkybarrier generated at the interface between the semiconductor layer andthe metal layer and the barrier layer suppresses a reaction between thesemiconductor layer and the metal layer. The interface control layer maybe or include, for example, a titanium layer and a titanium nitridelayer that are sequentially stacked.

A first insulating layer 100 a is disposed in a portion of the anode A,the cathode C, and the fuse link FL. The first insulating layer 100 amay be, for example, a device isolation layer formed in the substrate100 or an interlayer insulating layer formed on the substrate 100. Thefirst insulating layer 100 a may also be a silicon oxide layer.

A spacer pattern 120S may be disposed on the side walls of the anode A,the cathode C, and the fuse link FL. The spacer pattern 120S may includean L-type lower spacer 121 and an upper spacer 123 disposed on a portionof the lower spacer 121. The L-type lower spacer 121 may be or include,for example, a silicon oxide layer. The upper spacer 123 may be orinclude, for instance, a silicon nitride layer.

The anode A, the cathode C, and the fuse link FL may have a layeredstructure that is the same as a gate electrode (not shown) formed onanother region (not shown) of the substrate 100. In this case, the anodeA, the cathode C, the fuse link FL, and the gate electrode may be formedat the same time so that a process of manufacturing a semiconductordevice may be simplified.

A second insulating layer 130 may be disposed on the substrate 100 tocover the anode A, the cathode C, the fuse link FL, and the spacerpattern 120S. The second insulating layer 130 may be or include, forinstance, a silicon oxide layer. The first and second anode contacts135A₁ and 135A₂ may penetrate the second insulating layer 130 to contactthe anode A, and the first and second cathode contacts 135C₁ and 135C₂may penetrate the second insulating layer 130 to contact to the cathodeC. The first and second anode contacts 135A₁ and 135A₂ and the first andsecond cathode contacts 135C₁ and 135C₂ may be, for example, tungstenplugs that are disposed inside of contact holes 130 a.

FIG. 4 is a diagram illustrating the electrical fuse device of FIG. 2taken along line IIIb-IIIb′ in a programming mode according to anembodiment of the invention.

Referring to FIGS. 1, 2, and 4, the voltage applying circuit 10 isconfigured to apply a program voltage Vpp to the anode A of theelectrical fuse device F through an anode wiring (not shown) and thefirst anode contact 135A₁. When a fuse programming signal S₁ is appliedto a gate of the selection transistor Ts, the selection transistor Ts isturned on and a ground voltage is applied to the cathode C of theelectrical fuse device F through a cathode wiring (not shown) and thefirst cathode contact 135C₁. As a result, a programming current flowsthrough the electrical fuse device F and is centralized in the lowresistance conductive layer 115 included in the fuse link FL.

As described above, at least one of the first cathode contact 135C₁ andthe first anode contact 135A₁ may be disposed to cross the virtualextending surface FL_C or FL_A, respectively, of the fuse link FL.Accordingly, a programming current density of the fuse link FL may beuniform. Therefore, metal migration is uniformly generated in the lowresistance conductive layer 115 and a portion of the low resistanceconductive layer 115 is completely blown. As a result, the electricalfuse device F may be programmed without an error.

Subsequent to the blowing process, the voltage applying circuit 10 mayapply a sensing voltage to the anode of the electrical fuse device Fthrough the anode wiring (not shown) and the first anode contact 135C₁.Since the programmed electrical fuse device F can flow a current onlythrough the high resistance conductive layer 110, the resistance of theprogrammed electrical fuse device F is higher than the resistance of theelectrical fuse device F prior to programming. Such a resistancedifference is sensed by the fuse state sensing circuit 20.

FIG. 5 is a plan view of an electrical fuse device according to anotherembodiment of the invention. The electrical fuse device F of theembodiment illustrated in FIG. 5 is similar to that of FIG. 2, exceptfor the details described below.

Referring to FIG. 5, the fuse link FL contacts the anode A and thecathode C and is interposed between the anode A and the cathode C. Thearea of the cathode C may be substantially the same with the area of theanode A. The width W_FL of the fuse link FL in a Y direction may be lessthan the width W_C of the cathode C in a Y direction. The width W_FL ofthe fuse link FL in a Y direction may also be less than the width W_A ofthe anode A in a Y direction. But the width W_C of the cathode and thewidth W_A of the anode A may be substantially equal.

A cathode transition region (CTR), a tapered region in which the areathereof is gradually reduced in a fuse link FL direction, may beinterposed between the cathode C and the fuse link FL. In addition, ananode transition region (ATR), a tapered region in which the areathereof is gradually reduced in a fuse link FL direction, may beinterposed between the anode A and the fuse link FL. The cathodetransition region (CTR) and the anode transition region (ATR) facilitatea programming current to be centralized in the fuse link FL. The cathodetransition region (CTR) and anode transition region (ATR) can also beapplied to the electrical fuse device F illustrated in FIG. 2 where thearea of the cathode C exceeds the area of the anode A.

In the embodiment illustrated in FIG. 5, the width W_135C₁ exceeds thewidth of the W_C of the cathode C, and the width W_135A₁ exceeds thewidth W_A of the anode A. In an alternative embodiment (not shown), thewidth W_135C₁ exceeds the width of the W_C of the cathode C, but thewidth W_135A₁ does not exceed the width W_A of the anode A. In yetanother embodiment (not shown), the width W_135C₁ does not exceed thewidth of the W_C of the cathode C, but the width W_135A₁ does exceed thewidth W_A of the anode A.

With further reference to the embodiment of FIG. 5, the second cathodecontact 135C₂ coupled to the cathode C may be disposed relatively nearthe first cathode contact 135C₁. The second cathode contact 135C₂ mayalso be disposed to cross the width W_C of the cathode C. The secondanode contact 135A₂ coupled to the anode A may be disposed relativelynear the first anode contact 135A₁. The second anode contact 135A₂ mayalso be disposed to cross the width W_A of the anode A.

Dummy patterns D may be disposed proximate to the electrical fuse deviceF.

FIG. 6 is a sectional diagram of the electrical fuse device of FIG. 5taken along the line VI-VI′ of FIG. 5.

Referring to FIGS. 5 and 6, the first cathode contact 135C₁ is disposedto cross the width W_C of the cathode C. As illustrated, an upperportion of the spacer pattern 120S may be damaged. However, such damagedoes not affect an electric property of the electrical fuse device. Whenthe spacer pattern 120S includes a silicon dioxide lower spacer 121 anda silicon nitride upper spacer 123, a portion of the lower spacer 121may be etched.

FIG. 7 is a plan view of an electrical fuse device F according to yetanother embodiment of the invention. The electrical fuse device Fillustrated in FIG. 7 is substantially the same as the fuse device Fdescribed above with reference to FIGS. 5 and 6. In the embodiment ofFIG. 7, however, the fuse link FL has a width W_FL that is substantiallythe same as the width W_C of the cathode C and width W_A of the anode A.In other words, in the embodiment of FIG. 7, there is no tapered cathodetransition region CTR or tapered anode transition region ATR.

As described above, at least one of the first cathode contact 135C₁ andthe first anode contact 135A₁ may be disposed to cross the virtualextending surface FL_C and FL_A, respectively, of the fuse link FL andthus a current density in the fuse link FL can be uniform whileprogramming the electrical fuse device F. As a result, metal migrationin the fuse link FL uniformly occurs so that a fuse programming errorcan be reduced. The disclosed configuration may also reduce problemsassociated with misalignment of the first cathode contact 135C₁ and/orthe first anode contact 135A₁ with respect to the fuse link FL.

While the invention has been particularly shown and described withreference to exemplary embodiments thereof, it will be understood bythose of ordinary skill in the art that various changes in form anddetails may be made therein without departing from the spirit and scopeof the present invention as defined by the following claims.

1. An electrical fuse device comprising: an anode disposed on asubstrate; a cathode disposed on the substrate separate from the anode;a fuse link interposed between the anode and the cathode, the fuse linkcoupled to the anode and the cathode; a first cathode contact coupled tothe cathode, the first cathode contact having a width in a firstdirection that is greater than a width of the fuse link in the firstdirection; and a first anode contact coupled to the anode, the firstanode contact having a width in the first direction that is greater thanthe width of the fuse link in the first direction, wherein the firstcathode contact is disposed to cross a virtual extending surface of thefuse link in a cathode direction and the first anode contact is disposedto cross a virtual extending surface of the fuse link in an anodedirection.
 2. The electrical fuse device of claim 1, further comprising:a cathode transition region interposed between the cathode and the fuselink, an area of the cathode transition region being gradually reducedin a fuse link direction.
 3. The electrical fuse device of claim 1,further comprising: an anode transition region interposed between theanode and the fuse link, an area of the anode transition region beinggradually reduced in a fuse link direction.
 4. The electrical fusedevice of claim 1, further comprising: a cathode transition regioninterposed between the cathode and the fuse link, an area of the cathodetransition region being unchanged in a fuse link direction.
 5. Theelectrical fuse device of claim 1, further comprising: an anodetransition region interposed between the anode and the fuse link, anarea of the anode transition region being unchanged in a fuse linkdirection.
 6. The electrical fuse device of claim 1, wherein the firstcathode contact extends across the cathode.
 7. The electrical fusedevice of claim 1, wherein the first anode contact extends across theanode.
 8. The electrical fuse device of claim 1, further comprising: asecond cathode contact disposed proximate to the first cathode contact,the second cathode contact being coupled to the cathode.
 9. Theelectrical fuse device of claim 1, further comprising: a second anodecontact disposed proximate to the first anode contact, the second anodecontact being coupled to the anode.
 10. The electrical fuse device ofclaim 1, wherein the fuse link including a high-resistance conductivelayer and a low-resistance conductive layer that are sequentiallystacked.
 11. The electrical fuse device of claim 10, wherein thehigh-resistance conductive layer is one of a polysilicon layer and anamorphous silicon layer and the low-resistance conductive layer is oneof a metal layer and a metal silicide layer.
 12. The electrical fusedevice of claim 11, wherein the metal layer is one of a tungsten (W)layer, a molybdenum (Mo) layer, a tantalum (Ta) layer, a cobalt (Co)layer, a titanium (Ti) layer, an aluminum (Al) layer, a copper (Cu)layer, a platinum (Pt) layer, and wherein the metal silicide layer isone of a tungsten silicide layer, a molybdenum silicide layer, atitanium silicide layer, a tantalum silicide layer, a hafnium silicidelayer, a cobalt silicide layer, and a platinum silicide layer.
 13. Anelectrical fuse device comprising: an anode having an anode width; acathode having a cathode width; a fuse link having a fuse link widthaligned in a same direction as the anode width and cathode width, havinga fuse link length extending in direction substantially perpendicular tothe fuse link width, and being coupled between the anode and thecathode, wherein a virtual extending surface is defined along the fuselink length and extends at least partially into the anode and cathode; afirst cathode contact coupled to the cathode; a first anode contactcoupled to the anode; and a transition region interposed between thefuse link and at least one of the cathode and the anode, wherein atleast one of the first cathode contact and first anode contact extendsacross the virtual extending surface of the fuse link.
 14. Theelectrical fuse device of claim 13, wherein the transition region is acathode transition region interposed between the cathode and the fuselink, wherein an area of the cathode transition region being graduallyreduced from the cathode to the fuse link.
 15. The electrical fusedevice of claim 13, wherein the transition region is a anode transitionregion interposed between the anode and the fuse link, wherein an areaof the anode transition region being gradually reduced from the anode tothe fuse link.
 16. The electrical fuse of claim 13, wherein the fuselink width is less than the cathode width and the anode width.
 17. Theelectrical fuse device of claim 13, wherein the transition region is acathode transition region interposed between the cathode and the fuselink, wherein an area of the cathode transition region being unchangedfrom the cathode to the fuse link.
 18. The electrical fuse device ofclaim 13, wherein the transition region is a anode transition regioninterposed between the anode and the fuse link, wherein an area of theanode transition region being unchanged from the anode to the fuse link.19. The electrical fuse of claim 13, wherein the fuse link width is sameas the cathode width and the anode width.
 20. The electrical fuse ofclaim 13, wherein the cathode width is same as the anode width.